Fuad, A. and Ba Hashwan, S.S. and Haris Md Khir, M. and Nawi, I.M. and Isyaku Bature, U. (2023) Development of Dual Axis MEMS Accelerometer Based on SOI-MUMPs Using CoventorWare. In: UNSPECIFIED.
Full text not available from this repository.Abstract
The mathematical modeling, design, and simulation for a 2-axis MEMS accelerometer, using a crab-legged suspension structure are presented in this paper. The accelerometer is designed according to the SOI MUMPs fabrication technology which utilizes silicon on insulator wafer. CoventorWare software is used to construct and simulate the crab-legged accelerometer device to obtain its natural frequency. The mathematical modeling was calculated using MATLAB based on the proposed parameters. The main design parameter of the MEMS accelerometer is the natural frequency which was found to be 1483 Hz from CoventorWare and calculated by the mathematical model and found to be 1419 Hz with an error of 4. The accelerometer's sensitivity is 4.71E-17 F/g which is equivalent to 0.013 μ m/g sensitivity in distance change. Keeping in consideration that the beams' stiffness is calculated and found to be Kx=1.1 N/m, and Ky=0.33 N/m, the presented design allowed the accelerometer to have a measuring range of motion up to 3.7 g (36 m/s2). © 2023 IEEE.
Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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Additional Information: | cited By 0; Conference of 2023 IEEE International Conference on Sensors and Nanotechnology, SENNANO 2023 ; Conference Date: 26 September 2023 Through 27 September 2023; Conference Code:195657 |
Uncontrolled Keywords: | MATLAB; MEMS; Natural frequencies; Silicon on insulator technology; Silicon wafers, CoventorWare; Dual axis; Mathematical designs; Mathematical modeling; Mathematical simulations; MEMS accelerometer; Modeling designs; Modeling simulation; Simulation; SOI MUMPs, Accelerometers |
Depositing User: | Mr Ahmad Suhairi UTP |
Date Deposited: | 04 Jun 2024 14:11 |
Last Modified: | 04 Jun 2024 14:11 |
URI: | https://khub.utp.edu.my/scholars/id/eprint/18983 |