Design and characterization of Screen-Printed Piezoresistive Cantilever for Gas Sensor Application

Saleh, N. and Jamel, N. and Nawi, I.M. (2022) Design and characterization of Screen-Printed Piezoresistive Cantilever for Gas Sensor Application. In: UNSPECIFIED.

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Abstract

In this paper, the design, and the characterization of screen-printed cantilever-based humidity sensor are described. The project investigated in detail the sensitivity, and fabrication process of screen-printing based sensor with coated active humidity material on cantilever's free end. The main aim of this paper is to compare the screen-printed technology with other existing technologies like micro-electro-mechanical system (MEMS), and low temperature cofired circuit (LTCC). The sensor has been simulated under different level of relative humidity with two different temperature value: 35°C, and 45°C. This paper also represents an analytical and mathematical modeling approach for frequency shift and thick film resistance change of the selected sensor. The analytical results are compared with the simulated results. © Published under licence by IOP Publishing Ltd.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: cited By 0; Conference of 3rd International Conference on Emerging Electrical Energy, Electronics and Computing Technologies 2021, ICE4CT 2021 ; Conference Date: 16 December 2021 Through 17 December 2021; Conference Code:181861
Uncontrolled Keywords: MEMS; Microelectronics; Nanocantilevers; Temperature; Thick films, Cofired; Fabrication process; Free end; Gas-sensors; Lows-temperatures; MEMS (microelectromechanical system); Piezo-resistive cantilevers; Screen-printed; Sensor applications; System temperature, Screen printing
Depositing User: Mr Ahmad Suhairi UTP
Date Deposited: 19 Dec 2023 03:23
Last Modified: 19 Dec 2023 03:23
URI: https://khub.utp.edu.my/scholars/id/eprint/17553

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