This paper presents a research proposal on the electrostatic energy harvester utilizing Electret-based dielectric material on MEMS fabrication technique. An introduction of energy harvesting concept is covered along with the research objectives and methodology which include some literature reviews from the previous works of others. A simulation of the energy harvester model is carried out using the Matlab/Simulink as a proof of concept. Electret-based electrostatic energy harvester also called energy scavenger, is still new in the alternative energy concept, hence numerous opportunities to optimize the harvester's output power and efficiency will be explored and studied. © 2011 IEEE.