FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter

Hanif, M. and Jeoti, V. and Aslam, M.Z. (2020) FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter. In: UNSPECIFIED.

Full text not available from this repository.
Official URL: https://www.scopus.com/inward/record.uri?eid=2-s2....

Abstract

In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application. © 2020 IOP Publishing Ltd. All rights reserved.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: cited By 2; Conference of 2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019 ; Conference Date: 25 November 2019 Through 27 November 2019; Conference Code:161273
Uncontrolled Keywords: Acoustooptical effects; CMOS integrated circuits; Electromechanical coupling; Finite element method; II-VI semiconductors; Multilayers; Silicon compounds; Sports; Titanium dioxide; Zinc oxide, Acousto-optic tunable filters; Different thickness; FEM simulations; Figure of merit (FOM); Figure of merits; Layer structures; Multilayer structures; Propagation characteristics, Oxide minerals
Depositing User: Mr Ahmad Suhairi UTP
Date Deposited: 10 Nov 2023 03:27
Last Modified: 10 Nov 2023 03:27
URI: https://khub.utp.edu.my/scholars/id/eprint/13016

Actions (login required)

View Item
View Item