Characterization of MEMS comb capacitor Academic Article

http://dx.doi.org/10.1007/s00542-019-04671-1

authors

Ahmad, Farooq
Baig, Athar
Dennis, John Ojur
Hamid, Nor Hisham bin
Md Khir, Mohd Haris Bin

publication date

2020

published in

Microsystem Technologies Journal

Digital Object Identifier (DOI)

https://doi.org/10.1007/s00542-019-04671-1

number of pages

5

start page

1387

end page

1392

volume

26

issue

4