Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes Academic Article uri icon

authors

  • Aslam, Muhammad Zubair
  • Jeoti, Varun
  • Karuppanan, Saravanan A/L
  • Pandian, Mohanraj Soundara
  • Ferrer, Eloi Marigo
  • Suresh, Kasyap

publication date

  • 2020

start page

  • 112202

volume

  • 313