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Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs
Conference Paper
http://dx.doi.org/10.1109/icias49414.2021.9642706
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authors
Ba Hashwan, Saeed S.
Md Khir, Mohd Haris Bin
Al-Douri, Y
Yousif, A.
Ramza, H.
Arjo, S.
publication date
2021
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/icias49414.2021.9642706
