Design and simulation of a high temperature MEMS micro-hotplate for application in trace gas detection Conference Paper

http://dx.doi.org/10.1109/smelec.2008.4770297

authors

Ahmed, Abdelaziz Yousif
Dennis, John Ojur
Mohamad Saad, Mohamad Naufal
Talah, Waddah Abdelbagi

publication date

2008

Digital Object Identifier (DOI)

https://doi.org/10.1109/smelec.2008.4770297