Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath Conference Paper

http://dx.doi.org/10.1109/icias.2016.7824037

authors

Rabih, Almur. A. S.
Dennis, J. O.
Md Khir, Mohd Haris Bin
Ahmed, Mawahib Gafare

publication date

2016

Digital Object Identifier (DOI)

https://doi.org/10.1109/icias.2016.7824037