Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing Conference Paper

http://dx.doi.org/10.1109/rsm.2011.6088353

authors

Mirza, Asif
Md Khir, Mohd Haris Bin
Dennis, John Ojur
Ashraf, Khalid
Hamid, Nor Hisham bin

publication date

2011

Digital Object Identifier (DOI)

https://doi.org/10.1109/rsm.2011.6088353