authors
- Mirza, A.
- Hamid, Nor Hisham bin
- Md Khir, Mohd Haris Bin
- Dennis, J. O.
- Ashraf, K.
- Jan, M. T.
- Shoaib, M.
Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
Conference Paper
Overview
publication date
- 2013