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Study of nonlinear pull-in voltage effects in electrostatic cantilever-based MEMS sensors
Conference Paper
http://dx.doi.org/10.1109/icias.2014.6869509
Overview
Identity
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Overview
authors
Shoaib, Muhammad
Hamid, Nor Hisham bin
Ali, Noohul Basheer B Zain
Jan, M. Tariq
Mirza, Asif
publication date
2014
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/icias.2014.6869509
