FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure Academic Article

http://dx.doi.org/10.3390/s18061687

authors

Aslam, Muhammad
Jeoti, Varun
Karuppanan, Saravanan A/L
Malik, Aamir
Iqbal, Asif

publication date

2018

published in

Sensors Journal

Digital Object Identifier (DOI)

https://doi.org/10.3390/s18061687

start page

1687

volume

18

issue

6