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Post-CMOS processing and DC characterization of a resonant microcantilever for gas sensing
Conference Paper
http://dx.doi.org/10.1109/icias.2012.6306127
Overview
Identity
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Overview
authors
Mirza, A.
Hamid, Nor Hisham bin
Md Khir, Mohd Haris Bin
Dennis, J. O.
Ashraf, K.
publication date
2012
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/icias.2012.6306127
