Effects of RF magnetron sputtering deposition process parameters on the properties of molybdenum thin films Academic Article uri icon

authors

  • Chelvanathan, P.
  • Shahahmadi, S.A.
  • Arith, F.
  • Sobayel, K.
  • Aktharuzzaman, M.
  • Sopian, Kamaruzzaman
  • Alharbi, F.H.
  • Tabet, N.
  • Amin, N.

publication date

  • 2017

number of pages

  • 6

start page

  • 213

end page

  • 219

volume

  • 638