Development of Dual Axis MEMS Accelerometer Based On SOI-MUMPs Using CoventorWare Conference Paper

http://dx.doi.org/10.1109/sennano57767.2023.10352523

authors

Fuad, Ayah
Ba Hashwan, Saeed S.
Haris Md Khir, Mohd
Mohd Nawi, Illani Bt
Isyaku Bature, Usman

publication date

2023

Digital Object Identifier (DOI)

https://doi.org/10.1109/sennano57767.2023.10352523