Design and modeling of a CMOS-MEMS capacitive resonator based on bonded-dies for gas detection Conference Paper

http://dx.doi.org/10.1109/icias.2014.6869456

authors

Gafare, Mawahib
Dennis, J. O.
Md Khir, Mohd Haris Bin

publication date

2014

Digital Object Identifier (DOI)

https://doi.org/10.1109/icias.2014.6869456