A Review on Key Issues and Challenges in Devices Level MEMS Testing Academic Article uri icon

abstract

  • The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market.

authors

  • Shoaib, Muhammad
  • Hamid, Nor Hisham bin
  • Malik, Aamir Farooq
  • Zain Ali, Noohul Basheer
  • Tariq Jan, Mohammad

publication date

  • 2016

number of pages

  • 13

start page

  • 1

end page

  • 14

volume

  • 2016