Silicon - Post Processing CMOS Wafers to Create Integrated Sensors, Mems and Electro-Optic Systems Academic Article uri icon

authors

  • Walton, A.J.
  • Stevenson, J.T.M.
  • Underwood, I.
  • Terry, J.G.
  • Smith, S.
  • Parkes, W.
  • Dunare, C.
  • Lin, H.
  • Li, Y.
  • Henderson, R.
  • Renshaw, D.
  • Rae, B.
  • Muir, K.
  • Desmulliez, M.
  • Flynn, D.
  • MacIntosh, M.J.
  • Holland, W.S.
  • Murray, A. F.
  • Tang, Tong Boon
  • Bunting, A.

publication date

  • 2010

number of pages

  • 7

start page

  • 3

end page

  • 10

volume

  • 101

issue

  • 1