An explicit drive algorithm for aiding the design of firing sequence in side‐drive micromotor Academic Article uri icon

abstract

  • AbstractFinite element analysis (FEA) is used to design the rotor–stator layout and the driving algorithm for electrostatic‐actuated side‐drive micro electro‐mechanical system (MEMS) micromotor. FEA is performed to calculate the generated torque when voltage is applied to a single stator pole of the micromotor. A quasi‐static approach is then adopted to model the operation of the entire micromotor. The approach rotates the rotor based on the torque estimated by extrapolating the earlier FEA result for a single stator pole. This enables a fast and accurate enough way to model the performance of the rotor–stator layout and the micromotor drive algorithm. Copyright © 2008 John Wiley & Sons, Ltd.

publication date

  • 2008

number of pages

  • 5

start page

  • 2131

end page

  • 2136

volume

  • 24

issue

  • 12